The advantages of sputtering targets made of molybdenum
Molybdenum sputtering target different mechanical strength, refractoriness and corrosion resistance. In an aggressive liquid or gaseous media they don’t collapse and have a high modulus of elasticity and a small thermal coefficient of linear expansion. These advantages allow the use of molybdenum target in the most critical and complex technological production conditions. Molybdenum sputtering target, compared with tungsten easier almost doubled, so molybdenum products have high specific strength (at a temperature of not more than 1370 °C).
Practically the only disadvantage is the high cost of molybdenum targets, since molybdenum is a metal belonging to rare earth elements and in its pure form is quite difficult to identify. Besides, he is refractory and hard to work.
|The temperature at which the obtained data the features of t°C||20°C|
|The linear thermal expansion coefficient α [1/°C]||Of 4.9x10-6|
|The melting temperature t°C||2620°C|
|Specific heat at 20 °C [kJ/(kg·deg)]||0,256|
|The thermal conductivity K [W/(m·K)]||142|
|Electrical resistivity R, Mhmm2/m||0,054|
Molybdenum reacts with hydrochloric, sulfuric acids only at the temperature. 80−100°C. Nitric acid, Aqua Regia dissolved molybdenum only when температуре100°C. In cold alkaline solutions it is stable, but in hot alkaline solutions the molybdenum slowly being destroyed. Impurities of carbon, oxygen, silicon, aluminum, nitrogen, iron, sulfur and calcium, phosphorus, contained in the technical molybdenum in hundredths or thousandth fractions of a percent, significantly affect the properties of molybdenum. The bulk of these impurities makes molybdenum more fragile. Most harmful of all impurities is oxygen. If it is contained in a volume 0,0008−0,004%, the low-melting oxides can lead to a sharp increase in its brittleness and a decrease in properties to plastic deformation, especially in the simultaneous presence of carbon with nitrogen. With increasing percentage of oxygen than 0.015% molybdenum is not handled the pressure and becomes brittle.
Sputtering target made of molybdenum produced in the form of flat plates, discs and tubes by the method of electron-beam zone melting. According to customer’s drawings, molybdenum sputtering target is produced with any configuration, with tolerances and dimensions.
Sputtering molybdenum target.
MCIT, OCM, ТСМ3, ТСМ4, 58,8; 4604; 4605, ЦМВ30, ЦМ3, ЦМ1, ЦМ5, ЦМ6, MLT, BM2, ВМ1, ВМ3, MR-10, МР47ВП
Foreign grades (USA):
Mo, TZC, TM, and TZM, Mo-50Re, WM.
The maximum dimensions of a flat molybdenum target, mm:
rectangular target: 400x1550;
a disc-shaped target with a diameter of 630;
The use of molybdenum sputtering targets.
Molybdenum targets are used for deposition of the thinnest films on optical instrument glass, solar panels, etc.
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